JSAP 2011 Takuma Award to Masato Shibuya

By Ed Korczynski On Apr. 05, 2011

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Prof. Masato Shibuya was awarded the JSAP Takuma Award 2011 for invention of the phase-shift mask (PSM) and opening the field of advanced lithography, as reported by independent PSM inventor Marc Levenson.

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Author: edkorczynski

JSAP 2011 Takuma Award to Masato Shibuya

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