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HB-LED mask aligner for HVM

By Ed Korczynski On Feb. 25, 2011
Site: All of InfoNeedle
Type: Syndicated Blog - Tags: beta site | Equipment | fab - # of views: 364
Syndicated Blog: BetaBlog
EV Group upgrades aligner platform with optics for transparent wafers like sapphire to create 200wph proximity aligner for high-brightness LED (HB-LED) high-volume manufacturing (HVM): EVG620HBL
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